| 摘要 |
PURPOSE:To reduce the lift-off to improve the S/N and to prevent the thermal damager of a probe, by exposing the tip part of the probe from a water-cooled case and filling up the space between this tip part and a material to be examined with cooling water. CONSTITUTION:Cooling water is supplied form water supply pipes 6 and 6 into a water-cooled case 1. Cooling water is flowed along a tip part 8' of a probe 8 by guide faces 22 and 22 to cool the probe 8. Cooling water is flowed furthermore to a norrow space 25 between guide faces 23 and 23 and the surface of a material 24 to be examined. A space 26 between the tip part 8' of the probe 8 and the surface of the material 24 to be examined is filled up with cooling water by the flow resistance of the space 25, and the heat radiation to the probe 8 is cut off even if the material 24 to be examined has a high temperature. |
