| 摘要 |
PURPOSE:To enhance practicable characteristics, such as durability, by using a photoconductive material having an amorphous silicon layer contg. at least one of hydrogen and halogen, and a specified layer structure. CONSTITUTION:A photoconductive material always stabilized in electrical, optical, and photoconductive characteristics, superior in durability and humidity resistance, and little in residual potential is obtained by forming on a substrate 101, an auxiliary amorphous material layer 102 consisting essentially of silicon contg. up to 43 atomic % nitrogen, a charge injection preventive amorphous material layer 103 consisting essentially of silicon contg. elements belonging to the 3rd group of the periodic table, the first amorphous photoconductive layer 104 consisting essentially of silicon contg. at least one of hydrogen and halogen, and the second amorphous photoconductive layer 105 contg. silicon and carbon. |
