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发明名称
摘要
申请公布号
JPS5836896(B2)
申请公布日期
1983.08.12
申请号
JP19730013140
申请日期
1973.01.31
申请人
CANON KK
发明人
TAKASU YOSHIO;KONDO EIICHI
分类号
G03G5/00;G03G5/07;G03G5/08;G03G5/087;H01L31/08
主分类号
G03G5/00
代理机构
代理人
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