发明名称 CLASSIFYING METHOD FOR CHARACTERISTIC OF SEMICONDUCTOR ELEMENT PIECE
摘要 <p>PURPOSE:To reduce man-hours by measuring the characteristics of a chip after division according to the state of a substrate, arcing the results at the predetermined position of the chip and classifying the chip by arcs after division. CONSTITUTION:The substrate 1 is chucked onto a base 2, a value such as hFE is measured by probes 3, and the chip 6 is marked by a marker 4. Mark positions 61-65 are prescribed to the chip 6 by the value of hFE while using a division line 5 as a coordinate axis. Accordingly, the mark positions are read after division, the chip can be classified, measurement or the reading of marks is automated easily, and man-hours are reduced largely.</p>
申请公布号 JPS58134438(A) 申请公布日期 1983.08.10
申请号 JP19820017147 申请日期 1982.02.05
申请人 FUJI DENKI SEIZO KK 发明人 KURODA YOSHIBUMI
分类号 H01L21/66;H01L23/544 主分类号 H01L21/66
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