摘要 |
<p>PURPOSE:To reduce man-hours by measuring the characteristics of a chip after division according to the state of a substrate, arcing the results at the predetermined position of the chip and classifying the chip by arcs after division. CONSTITUTION:The substrate 1 is chucked onto a base 2, a value such as hFE is measured by probes 3, and the chip 6 is marked by a marker 4. Mark positions 61-65 are prescribed to the chip 6 by the value of hFE while using a division line 5 as a coordinate axis. Accordingly, the mark positions are read after division, the chip can be classified, measurement or the reading of marks is automated easily, and man-hours are reduced largely.</p> |