发明名称 |
Boat for the epitaxial growth of several layers from the liquid phase |
摘要 |
A boat for the epitaxial growth of several layers on a substrate includes reservoirs present over a slide in the boat, as well as substrates on a base plate in the boat. A fixedly arranged plate is placed between the base plate and the slide, which fixedly arranged plate and slide include communication windows for liquid solutions in the reservoirs to act on the substrates. Applications of this invention are epitaxial growth of several layers in general, and in particular, the manufacture of plates for opto-electronic semiconnector devices.
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申请公布号 |
US4397260(A) |
申请公布日期 |
1983.08.09 |
申请号 |
US19810254671 |
申请日期 |
1981.04.16 |
申请人 |
U.S. PHILIPS CORPORATION |
发明人 |
MAHIEU, MARC;VARON, JACQUES;VANDENBERG, PHILIPPE |
分类号 |
H01L21/208;C30B19/06;(IPC1-7):H01L21/20 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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