| 摘要 |
PURPOSE:To coat inside and outside of a specimen with photoresist at the same time by a method wherein the central inside of a specimen is supplied with photoresist through a turning shaft in addition to dripping the photoresist on the central outside of the specimen while the specimen is being turned. CONSTITUTION:A specimen 1 is placed on the gap adjusting pins 3 fixed on the surface of a specimen bed 2 and the periphery of the specimen 1 is fixed by fixing pins 4. A central hole 5 of the specimen bed 2 provided with a connecting part is coupled with a turning shaft 6 which is vertically supported by a bearing 8 fixed to a housing 7 to be connected to a power supply at the lower end. The turning shaft 6 is provided with a supplying hole 11 connecting photoresist outlet a at the central part. The photoresist coming from a supply source 12 is discharged onto the specimen bed 2 through adapter 13. On the other hand, a nozzle 16 is provided over the turning center of the specimen 1 to drip the photoresist coming from another supply source 15 on the specimen 1. |
