| 摘要 |
PURPOSE:To rotate the part in the vacuum chamber highly accurately, by providing the part so that it can be rotated and a bellows, whose one end is fixed to an opening part provided at the wall of the high vacuum chamber wherein said part is contained and other end is hermitically sealed by a flange. CONSTITUTION:A diffraction grating 2 in the high vacuum chamber 1 is mounted on a table 4 and a rotary shaft 3 of the table 4 is supported by a flange 5 through a ball bearings 6. The lower end of the rotary shaft 3 is engaged with a compressing end part of a horizontally provided lever 10. One end of the bellows 12 is welded to said flange 5 through a flange 14 and connected to an auxiliary chamber 13 wherein the lever 10 and the like are contained. At the intermediate part of the lever 10, the flange 11, which seals the end surface of the flange 12, is pierced by the lever 10 and the welding is performed in the hermetically sealing way. In this constitution, the part in the vacuum chamber can be rotated from the outside of the vacuum chamber highly accurately. |
