| 摘要 |
PURPOSE:To facilitate leading out of a lead wire through a fine gap in a manner to hold airtightness and to enable improvement of a precision of a pressure differential transmitter, by using a multilayer silicone plate as a diaphragm. CONSTITUTION:N type layers at a center of both sides of a multilayer silicon plate 1 are removed by an etching to form a P type pressure receiving part 2 and concavities 3 and 3'. Through applicatin of an inverse bias voltage to the pressure receiving diaphragm 2 and N type fixed parts 4 and 4', an electric insulating takes place. A voltage applied to seal diaphragms 8 and 8' at both sides is led to pressure receiving concavities 6 and 6' in the pressure receiving diaphragm 2 from pressure inlets 9 and 9', and a difference between the pressure at both sides displaces the diaphragm 2. The displacement functions as a moving electrode, and is fetched to the outside as a change in a volume in a volume between fixed electrodes 12 and 12'. |
