| 摘要 |
PURPOSE:To enable to perform a highly accurate positioning by a method wherein a blower, with which the air stream of almost constant temperature and speed is blasted against the vacant space including the optical path located between the IC package and an optical system, and an excellent image is obtained. CONSTITUTION:The IC package 1, which was heated by a heating block 3, is loaded for a positional detection and a pellet bonding, the cavity 2 of the IC package 1 is imaged on a sensor 7 by the optical system, and, at the same time, the position of a cavity is converted to an electric signal in the sensor 7. The cavity position is detected by the output of the sensor 7, when the above detection is performed, the air of constant temperature and speed is forcibly blasted from the blower 11 against the vacant space including the optical path located between the cavity 2 of the IC package 1 and the optical system 6. As a result, the air stream on the optical path and the circumference thereof is maintained at a fixed condition, a constant refractive index of medium is maintained, and the recognizable accuracy can be improved. Then, the pellet bonding is accurately performed by correcting its position using a controlling device 10 and the table for collet based on the positioning information of the cavity detected by an image processing device 9. |
