摘要 |
<p>PURPOSE:To obtain an optical shutter array having high density economically by forming common electrodes into comb shapes as well and into electrode shapes wherein the comb shapes face each other and removing the PLZT substrate between the adjacent electrodes. CONSTITUTION:Electrodes are formed on the same plane of a PLZT substrate 1, and common electrodes 21, 22- are made into comb shapes, wherein in the respective comb teeth, discrete electrodes 31, 31'-32, 32'- of rectangular strip shapes are provided by facing each other. Grooves 6 are formed between the adjacent electrodes including between the comb teeth of the comb-shaped electrodes, and similarly grooves 7 are formed between the adjacent sets of the common electrodes. Then, the ends of the electric lines of force on the common electrode side concentrate at the ends of the comb teeth, and the PLZT of high dielectric materials is removed between the adjacent electrodes; therefore, electric fields concentrate between the counter electrodes and do not spread. Thus, the shutter array having high density is obtained economically.</p> |