| 摘要 |
PURPOSE:To increase the space factor of starting materials and a heat insulating effect and to relieve the thermal loads of a coil frame and a stand in the manufacture of SiC by induction heating, by charging the starting materials into the inside and outside of an electrically conductive tube. CONSTITUTION:An electrically conductive cylindrical crucible 12 to be placed in a coil frame 15 holding a buried induction heating coil 14 is made small to leave a space B between the crusible 12 and a heat insulator 13. Starting materials 11 are filled into the space A and the crucible 12, and by induction-heating the crucible 12, SiC is manufactured. Thus, the space factor of starting materials is increased, and since the starting materials 11 show a heat insulating effect, the thickness of the heat insulator 13 can be reduced. |
