| 摘要 |
PURPOSE:To provide a sintered body for vacuum deposition by electron beam heating consisting of SiO2, TiO2 and Mo and giving stable optical constants. CONSTITUTION:A powdered mixture consisting of SiO2, TiO2 and metallic Mo is press-molded and sintered in vacuum. When the resulting sintered body is used as a source to be evaporated by electron beam heating to form a deposited film used especially as an antireflection film or a protective film, a homogeneous depositied film is obtd. and the optical constants of the film such as the refractive index and absorption coefft. are stable. |
