| 摘要 |
<p>PURPOSE:To obtain a humidity sensor high in sensitivity of humidity detection and wide in measurable humidity range, by hydrolyzing a mixture of a solvent and org. silicate in the presence of acid in the range of proper hydrolysis rate, coating an insulating base with this polymer obtained thus, drying and heat treating it in a specified temp. range. CONSTITUTION:Organic silicate, such as ethyl silicate, soln. in isopropyl alcohol is hydrolyzed by adding HCl and water so as to give 65-90% hydrolysis rate expressed in the following formula: mol of water added and participating in hydrolysis X2X100/mol of ethyl silicate. The produced silicate polymer is cast on a heat resistant glass plate 1 to give 10-150mum dried film thickness after drying at normal temp. and heat treated at 200-600 deg.C to form a humidity sensitive mateiral 3. A humidity sensor is obtained by attaching comb-shaped electrodes 2 and conductors 4 to it. This sensor is high in change of electrical resistivity all over the whole region of 0-100% relative humidity, high in response speed and stability, strong in adhesion of the film 3 to the base 1, and long in service life.</p> |
