| 摘要 |
PURPOSE:To reclaim the solid source plate by a method wherein both surfaces of a solid source plate are etched or ground chemically or mechanically to make new surface expose itself to atmosphere. CONSTITUTION:In a source plate formed into ceramics made of Al2O3, SiO2 etc. as well as B2O3, the internal oxides are accumulated onto the surface in proportion to usage thereof preventing B2O3 from evaporating. Likewise in another source plate made of thermal oxidized BN plate with its surface covered with B2O3 film, BxOyNz layer is formed near the surface between BN and B2O3 from evaporating. The defective surface layer of source plate at the end of the life thereof amounts to several or several scores mum in thickness. The source plate may be reclaimed by means of grinding down the defective layer using grains to be removed and cleaned up with etching solution paying attention not to damage the surface of source plate. |
