| 摘要 |
PURPOSE:To improve measuring efficiency while maintaining high measurement accuracy by a method wherein processes of the relative movement between the object to be measured and the detecting means are so divided as to perform only the detecting process at a low speed and other processes at a high speed. CONSTITUTION:A contact detector 1 is moved reciprocally under an operation of a drive unit 2 relative to the measuring direction of a workpiece W as an object to be measured. While a probe 1A attached to the distal end of the detector 1 is in contact with the workpiece W, a detection signal is applied through a signal detecting circuit 3 to a control section 4, which gives an NC apparatus 5 with various control signals in accordance with the certain setting process procedures and at the same time takes in input data of the apparatus 5 under the given condition. The apparatus 5 drives the unit 2 based on the difference between the measured value data from a position detector 6 attached to the drive unit 2 and the command value data, and also controls driving of the unit 2 in accordance with the control signal from the control section 4. |
