| 摘要 |
PURPOSE:To detect the position of the chip by low cost constitution by setting up a light-receiving means to the nose of a base, which contacts with an expanding sheet on which the chip adheres and corresponds to a pickup nozzle, in an automatic bonder. CONSTITUTION:Holes 6a-6d are each formed at symmetrical positions on x and y axes and holes 7a, 7b at positions symmetrical to the hole 6a on a (y') axis parallel with the (y) axis in the plane of the nose of the base 5. Beams entering the holes 6a-6d are detected by light-receiving elements 9c, 9d through optical fibers 8c, 8d, and an XY base is driven until incident light is interrupted by the chips 1 by control signals. Beams are detected by the holes 6c, 6d, the XY base is moved in parallel, beams are detected by the hole 7a, the base is turned in the counterclockwise direction, and the base is stopped at a position where 7a is light-shielded together with 7b. Said constitution has simpler structure, is of low cost, and can detect the position of the chip accurately as compared to a pattern recognizing device. |
