| 发明名称 |
HEATING METHOD FOR SILANE PYROLYSIS REACTOR |
| 摘要 |
<p>13143 IMPROVED HEATING METHOD FOR SILANE PYROLYSIS REACTOR An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant. S P E C I F I C A T I O N</p> |
| 申请公布号 |
CA1150480(A) |
申请公布日期 |
1983.07.26 |
| 申请号 |
CA19820407996 |
申请日期 |
1982.07.23 |
| 申请人 |
UNION CARBIDE CORPORATION |
发明人 |
IYA, SRIDHAR K.;VAN SLOOTEN, RICHARD A.;BRAATEN, MARK E.;LAY, JAMES R. |
| 分类号 |
B01J6/00;C01B33/029;(IPC1-7):C01B33/00 |
主分类号 |
B01J6/00 |
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