| 摘要 |
PURPOSE:To perfrom sensitization efficiently in accordance with a pattern, by an aperture structure where the aperture diameter is adjusted freely. CONSTITUTION:An ultraviolet luminous flux 4 emitted from a mercury lamp 3 is reflected through a lens system 5, a filter 6, a cold mirror 7, a slit 8, a plate- shaped mirror 9, and an aperture 17 by a mirror 10 and becomes a parallel luminous flux by a lens 11 and passes through a mask 12 and is reflected successively by a concave mirror 13, a convex mirror 14, and a concave mirro 15 to become a parallel luminous flux and is made incident to the surface of a wafer 16. Since the aperture 17 has the same structure as the aperture of a camera and the diameter of the aperture is adjuted freely, photosensitization is performed efficiently in accordance with a pattern. |
