ENERGY DISPERSION TYPE X-RAY SPECTROSCOPE

摘要

PURPOSE:To analyze an intended containing element easily using simple constitution by extracting selectively intended fluorescent X rays among a plural kind of fluorescent X rays outputted secondarily from a sample using a total reflection mirror. CONSTITUTION:An iron steel piece 12 as a sample mounted in the vacuum container 11 is irradiated with an electron beam 13 and a semiconductor detector 15 converts a generated fluorescent X-ray beam 14 into an electric pulse signal. The fluorescent X-ray beam 14 is reflected temporarily by the total reflection mirror 16 arranged in the vacuum container 11 to be mode incident to the semiconductor detector 15. In this case, when the critical angle of the total reflection is set properly, X-ray components having wavelength smaller than a prescribed wavelength are eliminated from the reflected X-ray beam 14.