| 摘要 |
PURPOSE:To improve the photodetection sensitivity without having no influence upon the propagation loss of an optical function part, by enhancing the photoconduction effect of a photodetecting part in comparison with an optical waveguide. CONSTITUTION:In the process where an optical waveguide 2 is formed by epitaxial growth, metal diffusion, ion implantation, or the like, a photodetecting part 5 is placed in a layer 7 consisting of a medium having a high photoconduction effect so that the photoconduction effect is enhanced only a part of the optical waveguide which is used as the photodetecting part 5, and the type and the concentration of a dopant of an epitaxial layer are changed or the type and the quantity of diffused matters are changed. |
