| 摘要 |
PURPOSE:To perform an excellent bonding operation without having manual help by a method wherein the bonding period is controlled by detecting the starting time of the bonding using a detector which detects the deflection of a wire bonding arm. CONSTITUTION:When a vertical moving mechanism 5 functions by the help of a driving motor 6 and the tip of the capillary 2, which is attached to the bonding arm 1, comes in contact with a bonding pad 7, a microscopic deflection is generated on the arm 1. This microscopic deflection is detected by a detectors 4a and 4b. A trigger signal which indicate the start of bonding, is obtained by properly processing the output signal of the detectors 4a and 4b. |
