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发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
JPS58123880(A)
申请公布日期
1983.07.23
申请号
JP19820005598
申请日期
1982.01.18
申请人
SUWA SEIKOSHA KK
发明人
NAKAMICHI TADAHIRO
分类号
C23F4/00;C23F1/08
主分类号
C23F4/00
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