| 摘要 |
PURPOSE:To improve the thermal conductivity of an electrostatic chuck by forming by flame spraying the first, second and third layers which construct a body, thereby reducing the thickness of the entire body. CONSTITUTION:The body 12 of an electrostatic chuck is composed of the first layer 13 made of an insulator, e.g., alumina and formed by flame spraying on a base plate 11, the second layer 13 made of a conductor, e.g., copper and formed by flame spraying on the layer 13, and the third layer 15 made, for example, of the alumina similar to the layer 13 and formed by flame spraying on the layer 14. Since the respective layers are formed by the flame spraying as described above, the thickness of the entire body 12 can be reduced, thereby improving the thermal conductivity and enhancing the cooling efficiency of the case that an adsorbed material 18 is cooled from the base plate 11 through the body 12. |
