| 摘要 |
PURPOSE:To form a protective film having a uniform film thickness, high abrasion resistance and solid lubricity on a magnetic recording layer by generating sputters by glow discharge between an anode consisting of the magnetic layer and a cathode consisting of a blank material for protective films. CONSTITUTION:A magnetic recording media such as a recording disc or the like applied only with the magnetic recording layer is installed by means of jigs 2 serving also an electrode as an anode in a chamber 4 fixed to a vessel base 5, and a blank material 3 for protecting films as a cathode, for example, arom. polyimide, arom. polyamide, arom. polyamide imide, polyphenylene oxide, polyphenylene sulfide, arom. polyurethane, polyimidazopyrolone, polybenzoate, polyoxydiazole, polybenzthiazole, polyquinoxaline, polysulfone or the like is provided. Gaseous argon is introduced into the chamber and high frequency electric power is applied between the electrodes, whereby the blank material for protective films is sputtered. |
