发明名称 |
DIAMETER CONTROL IN CZOCHRALSKI CRYSTAL GROWTH |
摘要 |
<p>Diameter control in Czochralski crystal growth is accomplished by progressively measuring both the temperature of the melt by heat sensor (11) and the weight of the residue of the melt in the crucible (2) by weighing means (9). The weight measurement data is fed to microprocessor (11) having a control algorithm. The microprocessor output and temperature measurement output are fed to a three-term temperature controller (13) which regulates the temperature of the melt to thereby control automatically the diameter of the crystal.</p> |
申请公布号 |
WO8302464(A1) |
申请公布日期 |
1983.07.21 |
申请号 |
WO1982AU00216 |
申请日期 |
1982.12.22 |
申请人 |
THE COMMONWEALTH OF AUSTRALIA CARE OF THE SECRETAR |
发明人 |
SEYMOUR, ROBERT, STEPHEN |
分类号 |
C30B15/28;C30B29/30;(IPC1-7):30B15/28;30B29/30;30B15/22 |
主分类号 |
C30B15/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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