| 摘要 |
PURPOSE:To suppress variance in electric characteristics by eliminating the need to arrange oscillators by connecting electrodes to both surfaces of one quartz plate simultaneously, and then separating the oscillators individually. CONSTITUTION:On a thin plate 13 of a piezoelectric material, tuning fork type oscillators 1 are formed through supporting parts by photoetching technique. A mask material 14 which has window parts permitting electrode connection parts of the oscillators 1 to appear is adhered to a thin film 13. By a thin-film forming method by vapor deposition, etc., from at least either side of the top and reverse surfaces of the thin plate 13, a conductive thin film is provided on the side wall of the oscillator 1 to connect the top and reverse electrodes in phase. Then, the oscillators 1 are separated individually from the supporting parts. Thus, easily assembled and small-sized oscillators 1 are obtained with extremely high mass- productivity. |
