| 摘要 |
PURPOSE:To obtain a discharging device which is suited for discharging a specified microvolume of high viscosity liquid in particular, such as molten solder for production of semiconductor devices accurately by each drop by making the inside diameter in the preceding end of a nozzle hole larger than the inside diameter of a liquid discharging hole of a liquid tank. CONSTITUTION:A needle valve 3 in the inlet part of a liquid discharge hole 2 provided in the bottom part of a liquid tank 1 contg. liquid L to be discharged is fixed to the preceding end of a valve stem 4 which is provided to the cover 5 of the tank 1 and extends by passing through a hole 6. In the device which is so arranged that pressure is exerted upon the liquid L surface from a pressure introducing hole 11, the inside diameter of the nozzle hole 10 of a nozzle 9 mounted to a nozzle body 8 having a liquid passage 7 communicating with the hole 2 is made larger than the inside diameter of the hole 2 equal to the inside diameter of the passage 7. Or a nozzle 16 has a divergent nozzle hole 19 wherein the inside diameter in the preceding end part is made larger than the diamter of the liquid passage 18 of a nozzle body 17 as shown an another figure. Then, a specified microvolume of liquid is made difficult to flow in the nozzle by the increased friction resistance of the liquid in the nozzle, and the defect of dropping dividedly in two drops by post drooping is prevented. |
