| 摘要 |
PURPOSE:To obtain an alloy target minimal in O content and having high density, by mixing a rapidly-cooled alloy powder having a rare earth metal-side eutetic point composition and a rapidly-cooled powder, the rest of the desired composition, and by subjecting the resulting powder mixture to compacting and then to pressure liquid-phase sintering at a temp. in the temp. range higher than the above eutectic point CONSTITUTION:An alloy having a rare earth metal-side eutectic point composition such as 88wt% Tb-12wt% Fe, etc., in an Fe-Tb binary diagram is melted and then is subjected to rapid cooling treatment to be formed into powder. Subsequently, a transition metal (e.g., Fe), the rest of the desired composition, is mixed with said powder to undergo compacting, and the resulting green compact is subjected to pressure liquid-phase sintering at a temp. in the range between the eutectic point of rare earth metal and a temp. higher than said eutectic point by 200 deg.C. At this time, it is necessary to carry out all the stages mentioned above in vacuum or in an inert-gas atmosphere. The obtained rare earth-transition metal alloy target is reduced in oxygen content to a minimum of <=1,000ppm hitherto impossible by conventional methods and shows b density as high as >=95%. |
