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发明名称
PROCEDE ET DISPOSITIF DE DEPOT PAR EVAPORATION SOUS VIDE UTILISANT UN FAISCEAU D'ELECTRONS MODULE ET UN ECRAN.
摘要
申请公布号
CH637168(A5)
申请公布日期
1983.07.15
申请号
CH19800003424
申请日期
1980.05.02
申请人
BOIS, DANIEL
发明人
DANIEL BOIS
分类号
C23C14/30;H01J37/305;(IPC1-7):C23C13/12;H01J37/30;H01L21/20
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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