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发明名称
AMORPHE, TANTAL ENTHALTENDE METALLSCHICHT UND VERFAHREN ZU IHRER HERSTELLUNG.
摘要
申请公布号
CH637167(A5)
申请公布日期
1983.07.15
申请号
CH19780003139
申请日期
1978.03.22
申请人
SIEMENS AG
发明人
GUENTHER MENZEL
分类号
C22C1/00;B05D1/08;C22C19/03;C22C27/02;C22C45/04;C23C4/08;C23C14/14;C23C14/54;(IPC1-7):C23C13/02;C23C15/00;H01C17/08
主分类号
C22C1/00
代理机构
代理人
主权项
地址
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