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发明名称
METHOD AND APPARATUS FOR VAPOR DEPOSITION
摘要
申请公布号
JPS58119333(A)
申请公布日期
1983.07.15
申请号
JP19810210742
申请日期
1981.12.30
申请人
KONISHIROKU SHASHIN KOGYO KK
发明人
SHINDOU MASANARI;OOTA TATSUO;SATOU SHIGERU;MIYOUKAN ISAO;SHIMA TETSUO
分类号
C23C14/06;B01J19/00;C23C14/32
主分类号
C23C14/06
代理机构
代理人
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