| 摘要 |
PURPOSE:To control discharging electric power suitably at the time of trigger discharge and to maintain the stable discharging state after the transfer to main discharge, by independently providing an AC power source for main discharge and AC power sources for trigger discharge, and independently providing a control unit for the main discharge and the trigger discharge. CONSTITUTION:A control unit 15 for controlling an AC power source 10 for applying discharge voltage is provided between AC power sources 14 for triggers and electrodes 1. When discharge is started, the voltages from the AC power sources 14 for the triggers are applied to trigger pins 3 through capacitors 4 based on the command of the control unit 15. Thus linear discharge is generated. Discharge is generated in discharge region 2, in which the electrodes 1 face to each other, owing to the charged particles yielded by said linear discharge. Laser gas 9 is excited and laser oscillation is started. Light is reflected between a partial reflecting mirror 11 and a total reflecting mirror 12. Part of the light is outputted through the partial reflecting mirror 11 as laser light 13. When the main discharge is started between the electrodes 1, the control is performed so that the power supply to the trigger pins 3 from the AC power sources 14 for the trigger pins 3 is stopped. Then the excessive power supply can be prevented. |
