| 摘要 |
PURPOSE:To obtain a device which can make macro-photographing in such a way that one chip of a photomask having a highly dense pattern is enlarged to the same size of a reticle, by combining an optical system containing a highly precise lens, a deveice system, and a lighting system. CONSTITUTION:The macro-photographing device of this invention is equipped with an X-stage 4 having an opening, through which a transmitting lighting light is passed to a photomask 1 to be photographed, a Y-stage 3, and a mask fitting tool 2. Moreover, a lens system having a lens 17 of 5-20 times magnification, >=300lines/mm. effective resolving power, and >=14mm. diameter effective photographing range, and a high resolution light sensitive dry plate 19 having <=10mu resolution, are provided. This device makes macro-photographing of one chip of the photomask. |
