THERMAL RECORDING HEAD

摘要

PURPOSE:To improve the recording efficiency and the pulse resisting life of a thermal recording head by employing silica nitride for the protective film of an electric wire conductor made up of a Cr-Si heat generating resistor and Cr-Al laminated film. CONSTITUTION:An electric wire conductor 3 comprising a chrome-silicon alloy thin film resistance 2 and a laminated film having a lower conductor layer of chrome and an upper conductor layer of aluminum on an alumina ceramic substrate 1 with a glazed smooth surface. A single layer film of silica nitride is formed thereon as protective film 4 by plasma gas phase growth.