X-ray crystal spectrometer and a method of evaluating measurement results obtained with an x-ray crystal spectrometer

摘要

An x-ray crystal spectrometer consists of a device for producing an electron beam for irradiating a sample and has a chamber for receiving a crystal, a proportional counter and a semiconductor detector for detecting x-rays. The crystal and the semiconductor detector are approximately within the same polychromatic radiation, so that the evaluation can be carried out with a multichannel analyser taking account of a single geometrical position of the sample with respect to the crystal or the semiconductor detector. All in all, this simplifies the analysis and improves the quantitative evaluation.