| 摘要 |
PURPOSE:To perform fine working with high accuracy by irradiating ionizing radiations to a polymer film consisting of 4-alkyl 3,5,8-trioxyabicylo[2,2,2] octo-1-y1-methoxy methyl styrene. CONSTITUTION:Ionizing radiations such as X-rays, electron rays or gamma rays are irradiated to a radiation sensitive polymer film consisting of a polymer contg. the 4-alkyl 3,5,8-trioxabicyclo[2,2,2]octo-1-y1-methoxy methyl styrene expressed by the formulaI(wherein R denotes a lower alkyl group) as a constituting unit, whereby patterns are formed. The sensitivity to ionizing radiations increases with an increase in the mol.wt. of the polymer and more preferable mol.wts. are 10,000-1,000,000. This method permits fine working with high accuracy and is suited for dry etching stages. |
