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发明名称
DEVICE FOR VACUUM VAPOR DEPOSITION
摘要
申请公布号
JPS58117874(A)
申请公布日期
1983.07.13
申请号
JP19810214874
申请日期
1981.12.30
申请人
SHIMAZU SEISAKUSHO KK
发明人
SANO HISAYOSHI;OOHATA KICHIJI
分类号
C23C14/22;C23C14/50;C23C14/56
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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