| 摘要 |
PURPOSE:To improve the reliability and signal processing performance of multichannel constitution by depositing an amorphous semiconductor layer on an optical integrated circuit substrate having passive functions or active functions. CONSTITUTION:In a glass substrate 6, a light guide part 7 is formed by an ion exchanging method and films 141 and 142 (In2O3-SnO2 transparent conductive film), 151 and 152 (p type amorphous silicon film), 161 and 162 (nondope amorphous silicon film), and 171 and 172 (n type amorphous silicon film) are deposited in said order by sputtering, glow discharge, resistance heating to constitute a photodetection part. This method is easy and provides shock resistance and signal light is absorbed and detected completely by the amorphous photodetection part, so crosstalk causes no problem even when the number of signal channels increases. |
