发明名称 SAMPLE DRIVING MECHANISM FOR ELECTRON BEAM UNIT
摘要 PURPOSE:To simplify a driving mechanism and independently adjut x and y coordinates by separately providing an inclination regulating axis while making common each of an aximuth angle regulating axis and x and y coordinate position regulating axes and setting a common axis and an inclination regulating axis in the vertical positional relation. CONSTITUTION:A hollow axis hole 90 with an axis O2 that is deviated downward in relation to an axis O1 is established at the axial body 36 of a sample inclining member 32 and three rotary axes of an azimuth angle regulating axis 43, an x coordinate regulating axis 44, and a y coordinate regulating axis 45 are sequentially provided from the outside to the inside and is coaxially installed in relation to the axis O2 in the axis hole 90. These regulating axes 43-45 have worm wheels 46-48 at the respective input side ends. On the other hand, a worm 49 is rotatively supported on the axial body 36 of the sample inclining member 32 through a bearing 98 and is engaged with the worm wheel 46. Besides, a control knob 91 is provided on one end of the worm 49. The azimuth angle regulating axis 43 can be revolved by rotating this knob 91.
申请公布号 JPS58115740(A) 申请公布日期 1983.07.09
申请号 JP19810209919 申请日期 1981.12.28
申请人 KOKUSAI SEIKOU:KK 发明人 SUZUKI SHIGERU
分类号 H01J37/20;H01J37/28 主分类号 H01J37/20
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