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发明名称
METHOD FOR VAPOR DEPOSITION
摘要
申请公布号
JPS58114724(A)
申请公布日期
1983.07.08
申请号
JP19810213162
申请日期
1981.12.28
申请人
KONISHIROKU SHASHIN KOGYO KK
发明人
SHINDOU MASANARI;OOTA TATSUO;SATOU SHIGERU;MIYOUKAN ISAO;SHIMA TETSUO
分类号
C23C14/24;B01J19/00
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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