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发明名称
VERFAHREN UND VORRICHTUNG ZUM AUSRICHTEN
摘要
申请公布号
DE3248382(A1)
申请公布日期
1983.07.07
申请号
DE19823248382
申请日期
1982.12.28
申请人
CANON K.K.
发明人
SUZUKI,AKIYOSHI
分类号
H01L21/027;G03F7/20;G03F9/00;G05D3/12;H01L21/30;(IPC1-7):H01L21/68
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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