Verfahren und Vorrichtung zur Herstellung von Miniaturbauelementen, insbesondere von Halbleiterbauelementen, nach der Maskenmethode,申请号CH19620014798-传众专利搜索

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发明名称	Verfahren und Vorrichtung zur Herstellung von Miniaturbauelementen, insbesondere von Halbleiterbauelementen, nach der Maskenmethode
摘要
申请公布号	CH406444(A)	申请公布日期	1966.01.31
申请号	CH19620014798	申请日期	1962.12.17
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	EUGENE HARDING,WILLIAM
分类号	G03F7/20;H01L21/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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