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发明名称
摘要
申请公布号
JPS5830735(B2)
申请公布日期
1983.07.01
申请号
JP19740016224
申请日期
1974.02.12
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
UCHIDA MASAHITO
分类号
H01L21/22
主分类号
H01L21/22
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