| 摘要 |
PURPOSE:To remove a scanning oscillation deformation from the image, by giving a filtering process to remove low frequency variation components to the uneven positioning amount of scanning direction of image line pieces found from the results of correlational operation between the image line pieces. CONSTITUTION:An image correcting device for a scanning type electron microscope 1 is formed of a scanning image data buffer 3, arithmetic units 4 to 7 to find the uneven positioning amounts of scanning direction of image line pieces, and image processing devices 9 and 10 to correct the uneven positioning amount of scanning direction in the image data buffer 3 depending on the uneven positioning amount. In this case, at the latter stage of the arithmetic units 4 to 7, a filtering unit 8 is furnished to remove the low frequency components of the variation with respect to the image line number, of the uneven positioning amount. And a one direction projection data is found to the two-dimensional array determined by the line number and the distances between lines, and a scanning vertical direction scanning oscillation is inferred to give a correction. Therefore, the scanning oscillation deformation can be removed in a high speed and with a high accuracy. |
