Temperature sensor and detector cell utilizing the same

摘要

A temperature sensor uses a thin film structure having an RF sputtered layer of a temperature sensitive material forming a thermistor element deposited on an electrically insulating and thermally insulating substrate. The sensor may include a plurality of deposited thermistor layers arranged on both sides of the substrate and having electrical connection means attached thereto. The sensor is arranged on a substrate suitable for inclusion in a detector cell forming a chamber arranged to be connected to a source of fluid flow.