| 摘要 |
PURPOSE:To detect the film thickness and resist film quality formed on a substrate by a method wherein a detector revolving together with substrate is provided on a substrate holder. CONSTITUTION:The lower edge of a substrate holder 13 is formed into a notch 13a wherein a rock crystal oscillator 16 and resistance measuring device 18 are supported by the substrate holder 13 so that they may be leveled with the height of substrate film surface. Said measuring device 18 comprises electrodes 20 formed on insulated substrate 19 at specified interval and each electrode 20 is connected to conductive wire 21. Both conductive wires 17, 21 of the rock crystal oscillator 16 and the resistace measuring device 18 are connected to a measuring device arranged outside the cavity 1 through the axle core of an axle 12. The substrate, rock crystal oscillator 16 and resistance measuring device 18 supported by the substrate holder 13 revolve as one body respectively forming thin films with the same thickness. Therefore the film thickness may be correctly detected by the fluctuation of the output of said rock crystal oscillator. |
