| 发明名称 |
Boatless point source evaporation method |
| 摘要 |
A vapor deposition method of coating substrates with a material involves evaporating the end of a wire or rod made of that same material. The end of the wire is inductively or radiantly heated to form a molten convex miniscus thereon which serves as the coating source for the substrates.
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| 申请公布号 |
US4390571(A) |
申请公布日期 |
1983.06.28 |
| 申请号 |
US19810278932 |
申请日期 |
1981.06.30 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COSGROVE, JAMES F.;DAHLKE, GERHARD P.;WURMS, CHARLES |
| 分类号 |
C23C14/14;C23C14/24;C23C14/26;(IPC1-7):B05D3/02;B05D3/06;B05D3/14;B05D5/12 |
主分类号 |
C23C14/14 |
| 代理机构 |
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代理人 |
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