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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS58108750(A)
申请公布日期
1983.06.28
申请号
JP19810207421
申请日期
1981.12.22
申请人
DAINI SEIKOSHA KK
发明人
ENDOU SHIGEKAZU;HOSAKA TAKASHI
分类号
H01L29/78;C23C16/40;H01L21/316
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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