| 发明名称 |
FINE-LINE SOLID STATE DEVICE |
| 摘要 |
<p>Sheng-3-13 FINE-LINE SOLID STATE DEVICE Aluminum electrically conducting patterns for integrated circuits are achieved with narrow lines and unexpectedly-high electromigration characteristics by making the crystal grains of the pattern into a chainshaped structure with {111} orientation. A process for achieving the structure is also described.</p> |
| 申请公布号 |
CA1149082(A) |
申请公布日期 |
1983.06.28 |
| 申请号 |
CA19800363015 |
申请日期 |
1980.10.22 |
| 申请人 |
WESTERN ELECTRIC COMPANY, INCORPORATED |
发明人 |
SHENG, TAN T.;SINHA, ASHOK K.;VAIDYA, SHEILA |
| 分类号 |
H01L21/3205;H01L21/768;H01L23/532;(IPC1-7):H01L21/441;H01L21/88;H01L29/42 |
主分类号 |
H01L21/3205 |
| 代理机构 |
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代理人 |
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