| 摘要 |
PURPOSE:To attempt contact inspection without liquid contacting medium, elimination of contamination of a specimen and miniaturization of an apparatus, by allowing a detecting unit to shift for deviation in the conveying direction of a moving body and holding tightly a stylus on a surface of the moving body. CONSTITUTION:When a detecting unit 20 approaches a cylinder 10, a friction plate 24 of a synchronizer 22 is brought to contact with the cylinder, a body subject to flaw detection, and next, a spring 25 is compressed and a stylus 21 is brought to tight contact with cylinder 10 through a rubber contact medium 23. Here, the synchronizer 22 is brought to contact with a surface of the cylinder 10 by the increase of compressing force and starts to move in the peripheral direction in synchronization with this. Next, upon further advance of a slider 42, a spring 27 is deformed to absorb this movement. Next, when a crank mechanism rotates further by a half revolution, the slider 42 begins retreat to firstly separate the stylus 21 and then, the entire detecting unit 20 is separated from the cylinder 10 to end a cycle. And, a measuring operation by the stylus 21 is conducted with the timing with which the stylus 21 is brought to contact with the cylinder 10 and is moving.
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